Легирование полупроводников методом ядерных реакций / Л.С. Смирнов, С.П. Соловьев, В.Ф. Стась, В.А. Харченко ; АН СССР, Сиб. отд-ние, Ин-т физики полупроводников.
Material type:
TextLanguage: Russian Publication details: Новосибирск : Наука. Сиб. отд-ние, 1981Description: 181 с. : ил. ; 21 смSubject(s): Полупроводники -- Легирование ядерное
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