Физика субмикронной литографии / К.А. Валиев.
Material type: TextLanguage: Russian Publication details: Москва : Наука, 1990Description: 527,[ 1] сISBN: 5020143812Subject(s): МикролитографияItem type | Current library | Call number | Status | Notes | Date due | Barcode |
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Գրքեր/Books | Fundamental Scientific Library | PII/625492 (Browse shelf(Opens below)) | Available | 30 Days Loan | 120625492 | |
Գրքեր/Books | Fundamental Scientific Library | PII/627095 (Browse shelf(Opens below)) | Available | 30 Days Loan | 120627095 |
Библиогр. в конце глав
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