Физические основы субмикронной литографии в микроэлектронике / К.А. Валиев, А.В. Раков.
Material type: TextLanguage: Russian Publication details: Москва : Радио и связь, 1984Description: 350 с. : ил. 32, табл. 27Subject(s): МашиностроениеItem type | Current library | Collection | Call number | Status | Notes | Date due | Barcode |
---|---|---|---|---|---|---|---|
Գրքեր/Books | Fundamental Scientific Library | General | PII/528205 (Browse shelf(Opens below)) | Available | 30 Days Loan | FL0175787 | |
Գրքեր/Books | Fundamental Scientific Library | General | PII/528913 (Browse shelf(Opens below)) | Available | 30 Days Loan | FL0173963 |
Библ. 224 назв.
There are no comments on this title.