Defects in high-k gate dielectric stacks : Nano-electronic semiconductor devices /
Defects in high-k gate dielectric stacks : Nano-electronic semiconductor devices /
Ed. by Evgeni Gusev.
- Dordrecht, The Netherlands : Springer, 2006.
- x, 492 p. : ill.
- NATO Science Series Series II : Mathematics, Physics and Chemistry Vol. 220 .
"Proceedings of the NATO Advanced Research Workshop on Defects in High-k Dielectric Nano-electronic Semiconductor Devices, held July 11-14, 2005, in St. Petersburg, Russia." - Colophon.
Includes bibliogr. references and indexes
140204366X (PB) 1402043651 (HB) 1402043678 (e-book)
Gate array circuits--Congresses
Dielectrics--Congresses
Semiconductors--Defects--Congresses
"Proceedings of the NATO Advanced Research Workshop on Defects in High-k Dielectric Nano-electronic Semiconductor Devices, held July 11-14, 2005, in St. Petersburg, Russia." - Colophon.
Includes bibliogr. references and indexes
140204366X (PB) 1402043651 (HB) 1402043678 (e-book)
Gate array circuits--Congresses
Dielectrics--Congresses
Semiconductors--Defects--Congresses
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